Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control for Thin Film Deposition

Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control

for Thin Film Deposition

Princeton Docket # 13-2931-1

Multi-target manipulators are one of the crucial parts in multi-layered film depositions such as Pulsed Laser Deposition (PLD). The complicated motion of the currently manufactured rotary multi-target manipulator prevents the targets from having an effective thermal contact with any type of heat sink, making it difficult to adjust the temperature of the existing multi-target manipulators. Adjustable temperature control of targets is required for some film deposition applications, such as Matrix Assisted Pulsed Laser Evaporation (MAPLE), where cryogenic temperature is needed to freeze organic solutions. To address the need for the temperature adjustable rotary multi-target manipulators, Princeton University researchers have developed a new type of target manipulator.

This new design of target manipulator can translocate as well as rotate multiple targets using a simpler design. The rotatable targets are allowed to be transferred in a linear direction and this translational motion allows increased convenience and flexibility in positioning the targets. Most importantly, this new device  maintains an effective thermal contact between the targets and a  heat sink during the target manipulation,  allowing the temperature of the conductive targets to be adjusted by the conductive  plate as it  is either cooled or heated.

This new type of Linear-Translational Multi-Target manipulator can be used for thin film deposition such as PLD or Ion Beam Deposition (IBD), in which temperature adjustable multiple targets should be both rotatable and transferrable in the deposition process. In addition, it can also be used as temperature-adjustable multiple substrate located at the bottom of a system where target material are deposited.

Applications