|
Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control
for Thin Film Deposition
Princeton Docket # 13-2931-1
Multi-target manipulators are one of the crucial parts in multi-layered film depositions such as Pulsed Laser Deposition (PLD). The complicated motion of the currently manufactured rotary multi-target manipulator prevents...
Published: 3/15/2018
|
Inventor(s): Hyuncheol Jeong, Craig Arnold, Rodney Priestley
Keywords(s): materials, metamaterials, process optimization
Category(s): Ceramics/Material Sciences
|